Global tilt extraction for BEOL contact landing displacement control
spiedigitallibrary.org
Global tilt extraction for BEOL contact landing displacement control
3D NAND has become mainstream storage devices in a past decade and the stacking cell layers now reaches to more than 300 layers. As stack gets higher, more and more etching process challenges are brought into 3D NAND high aspect ratio (HAR) structure patterning. Among the HAR etching processes, the deep contact etches in the back-end-of-line ...
6 months ago
Back end of line BEOL Process
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