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A lamella of Indium Phosphide (InP) was prepared using cryo-FIB. While FIB process at RT left sub-10 nm precipitates on the surface and consequent curtaining artifacts even after 1 kV finishing, cryo FIB process at -120 °C reduced the diameter of the In crystal precipitates. Atomic resolution HAADF-STEM image obtained at RT FIB process showed partially bright background, whereas cryo-FIB produced clear atomic columns without the influence of the precipitates. #IndiumPhosphide #InP #Cryo #FIB #Cr
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