Abstract: Targeting the demand for three-dimensional (3D) micro/nanostructure fabrication, we systematically investigate the optical field formation mechanism in non-coplanar 3+1 beams interference.

Optical lithography is employed in manufacturing integrated circuits. It starts with attaching a photosensitive material—or photoresist—to the substrate. A photomask with the required pattern is ...

BEIJING -- China on Thursday blasted the United States for directly interfering in and disturbing the export of lithography machines by Dutch companies to China. "The US side has instrumentalized and ...

Prominent conservatives, including the president, sounded familiar alarms about voter suppression and other efforts to manipulate the vote on Election Day, without presenting evidence. By Steven Lee ...

Imagine a machine so advanced it operates with light invisible to the human eye, etching circuits onto silicon wafers at scales smaller than a virus. This is the world of EUV lithography, a ...

Researchers review AI-powered inverse lithography, showing how deep learning boosts chip patterning precision and efficiency while facing scaling challenges. Computational lithography optimizes the ...

Fig. 1 The lithography process. The projection lithography system. The advancement of semiconductor manufacturing is a key driver of electronic device innovations. As Moore’s Law progresses, ...

Semiconductor lithography "remains a critical constraint for China," according to the Center for Security and Emerging Technology, or CSET. Dutch company ASML has not been able to sell its ...

The mood at this year’s SPIE Advanced Lithography + Patterning Symposium was decidedly upbeat. The outlook for business is good, due in large measure to expectations of high demand for chips, driven ...

There is a new type of EUV lithography using only four reflective mirrors overturns conventional technology and will contribute to advanced semiconductors at 7nm and below. Professor Tsumoru Shintake ...