The precise control of feature sizes exhibits great importance in fabricating nanodevices for optoelectronics, plasmonics, meta-optics, and biosciences, just to name a few. Some applications require ...
ESOL has developed a standalone interference extreme ultraviolet (EUV) lithography tool for use in R&D applications. The system, called EMiLE (EUV Micro-interference Lithography Equipment), is primary ...
M. K. Sears, J. Bekaert, B. W. Smith, "Pupil wavefront manipulation for optical nanolithography", Proc. SPIE 8326, (2012) paper M. K. Sears, G. Fenger, J. Mailfert, B ...
ILSim is a compact, multi-beam interference lithography simulator. ILSim is based on full vector interference theory, which allows for application at extremely high NA values, such as those projected ...
This imaging performance enables imec’s ecosystem of resist and patterning partners to utilize the NXE:3400B as a platform for early material development for future process nodes that will be enabled ...
Michal Lipson and pals at Cornell University and Xiang Zhang and buddies at UC Berkeley say they have both built cloaks that are essentially mirrors with a tiny bump in which an object can hide. The ...
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Temperature Control in Lithography
Optical lithography is employed in manufacturing integrated circuits. It starts with attaching a photosensitive material—or photoresist—to the substrate. A photomask with the required pattern is ...
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