Cymer LLC of Rancho Bernardo has introduced a new laser light source for microchip manufacturing. Cymer unveiled the new machine, called the XLR 700ix, on Dec. 1. The product is an argon fluoride ...
Focus drilling is a process of broadening the light source bandwidth that leads to a higher depth of focus needed for contacts and vias. The technology leverages unique advancements in the light ...
Cymer's XLR 600ix light source has been integrated into a scanner at Nikon, and successfully installed at the Asia-based chipmaker. The 60-90 watt (60-90W) immersion light source will allow chipmakers ...
Cymer, an ASML company, has announced its new argon fluoride (ArF) immersion light source, the XLR 700ix. Built on the XLR platform, the 700ix provides improvements in bandwidth, wavelength and energy ...
ASML subsidiary extends lifetime of optics inside giant lithography tools. SAN DIEGO, Aug. 27, 2018 /PRNewswire/ -- Cymer, a leading manufacturer of excimer lasers used in semiconductor manufacturing, ...
As the company gears up for next week's Semicon West conference, being held in San Francisco, deep ultraviolet (DUV) illumination sources supplier Cymer Inc. this week has announced the appointment of ...
Claiming its new ArF laser to be the world's first laser for 45nm immersion lithography, Cymer is hoping to corner this semiconductor development technology market. Cymer, Inc., San Diego CA, US, a ...
Concerns that the bandwidth of the light source for optical lithography can affect pattern quality are not new. No lens material is completely free from chromatic aberration: the refractive index ...
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